Advances in Femtosecond Laser GHz-Burst Drilling of Glasses: Influence of Burst Shape and Duration

文章发表于2023年5月30日

MDPI – Micromachining Journal

Abstract:

The femtosecond GHz-burst mode laser processing has attracted much attention in the last few years. Very recently, the first percussion drilling results obtained in glasses using this new regime were reported. In this study, we present our latest results on top-down drilling in glasses, focusing specifically on the influence of burst duration and shape on the hole drilling rate and the quality of the drilled holes, wherein holes of very high quality with a smooth and glossy inner surface can be obtained. We show that a decreasing energy repartition of the pulses within the burst can increase
the drilling rate, but the holes saturate at lower depths and present lower quality than holes drilled with an increasing or flat energy distribution. Moreover, we give an insight into the phenomena that may occur during drilling as a function of the burst shape.

下载全文 Advances in Femtosecond Laser GHz-Burst Drilling of Glasses_May2023-avec compression

Keywords: ultrafast laser processing; femtosecond GHz-bursts; laser–material interaction; glasses;
percussion drilling

Authors:

Pierre Balage, Université de Bordeaux-CNRS-CEA, CELIA UMR 5107

Guillaume Bonamis, Amplitude

Manon Lafargue, Université de Bordeaux-CNRS-CEA, CELIA UMR 5107 & Amplitude

Théo Guilberteau, Université de Bordeaux-CNRS-CEA, CELIA UMR 5107

Martin Delaigue, Amplitude

Clemens Hönninger, Amplitude

Jie Qiao, Université de Bordeaux-CNRS-CEA, CELIA UMR 5107 & Chester F. Carlson Center for Imaging Science, Rochester Institute of Technology

John Lopez , Université de Bordeaux-CNRS-CEA, CELIA UMR 5107

Inka Manek-Hönninger, Université de Bordeaux-CNRS-CEA, CELIA UMR 5107